JPH0449689Y2 - - Google Patents
Info
- Publication number
- JPH0449689Y2 JPH0449689Y2 JP15218285U JP15218285U JPH0449689Y2 JP H0449689 Y2 JPH0449689 Y2 JP H0449689Y2 JP 15218285 U JP15218285 U JP 15218285U JP 15218285 U JP15218285 U JP 15218285U JP H0449689 Y2 JPH0449689 Y2 JP H0449689Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- fluid
- mass flow
- flow rate
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 23
- 238000005259 measurement Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000003708 edge detection Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
- Flow Control (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218285U JPH0449689Y2 (en]) | 1985-10-04 | 1985-10-04 | |
| KR1019860000246A KR900000663B1 (ko) | 1985-01-19 | 1986-01-17 | 유량제어장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15218285U JPH0449689Y2 (en]) | 1985-10-04 | 1985-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6262309U JPS6262309U (en]) | 1987-04-17 |
| JPH0449689Y2 true JPH0449689Y2 (en]) | 1992-11-24 |
Family
ID=31069931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15218285U Expired JPH0449689Y2 (en]) | 1985-01-19 | 1985-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449689Y2 (en]) |
-
1985
- 1985-10-04 JP JP15218285U patent/JPH0449689Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6262309U (en]) | 1987-04-17 |
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